Advisory Message

Hi there!

We are passionate about electronic products and hope to make your work easier. Ask us for any content or give us feedback

Exclusive customer service

Consult Immediately

+86 13430584894

Piezoman

763003010

luojunjie@piezoman.com

Foreign languages periodicals

Apply filter

20 Apr,2023|Foreign languages periodicals

Femtosecond laser-assisted fabrication of piezoelectrically actuated crystalline quartz-based MEMS resonators

A novel technology for the precise fabrication of quartz resonators for MEMS applications is introduced. This approach is based on the laser-induced chemical etching of quartz. The main processing steps include femtosecond UV laser treatment of a Cr-Au-co